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Critical Dimension (CD)
Calibration Test Specimens

for SEM, FIB, and AFM

critical dimension specimen critical dimension specimen critical dimension specimen

"Critical Dimension (CD) structures" are particularly useful for SEM / FIB magnification calibration and may be used for AFM

Microscopists and engineers using high performance SEMs or FIB systems will find this calibration test specimen useful. The 4.8 x 4.8mm silicon standard has a series of patterns with a side length of 480µm around its edges, helpful for orientation. There are three versions available.

critical dimension specimen

Version with a 10-5-2-1µm with a central area comprises four line patterns, each one clearly identified by its pitch. Each pattern has five bars and spaces of equal pitch: 1.0µm, 2.0µm, 5.0µm and 10.0µm. The central line structure area may be used for AFM measurements. The patterns are etched into Si, approximately 200nm deep. The patterns are therefore slightly lower than the Si surface. There is no coating on the Si surface.

Each standard is identified by a serial number.

Two 618 types are offered:

-1: Non-certified (batch measurement protocol)
-3: Certified by the German Physikalisch-Technische Bundesanstalt ("PTB")

Ordering Information:
Prod #DescriptionUnitPriceOrder / Quote
Unmounted
618-1
CD Structure 1-2-5-10µm Specimen, non-certified, unmounted
each
$67.50
Qty:
618-3
CD Structure 1-2-5-10µm Specimen, certified traceable by German Physikalische Technical Bundesanstalt, unmounted
each
864.50
Qty:
Mounted, Non-certified: (see mount selections, types A-M )
618-1A
CD Structure 1-2-5-10µm Specimen, non-certified, Mount A
each
74.60
Qty:
618-1B
CD Structure 1-2-5-10µm Specimen, non-certified, Mount B
each
74.60
Qty:
618-1C
CD Structure 1-2-5-10µm Specimen, non-certified, Mount C
each
74.60
Qty:
618-1D
CD Structure 1-2-5-10µm Specimen, non-certified, Mount D
each
74.60
Qty:
618-1E
CD Structure 1-2-5-10µm Specimen, non-certified, Mount E
each
74.60
Qty:
618-1G
CD Structure 1-2-5-10µm Specimen, non-certified, Mount G, You Supply Mount
each
174.60
Qty:
618-1K
CD Structure 1-2-5-10µm Specimen, non-certified, Mount K
each
74.60
Qty:
618-1L
CD Structure 1-2-5-10µm Specimen, non-certified, Mount L
each
74.60
Qty:
618-1M
CD Structure 1-2-5-10µm Specimen, non-certified, Mount M
each
74.60
Qty:
Mounted, Certified by the German Physikalische Technische Bundesanstalt (see mount selections, types A-M )
618-3A
CD Structure 1-2-5-10µm Spec., Certified, Mount A
each
884.50
Qty:
618-3B
CD Structure 1-2-5-10µm Spec., Certified, Mount B
each
884.50
Qty:
618-3C
CD Structure 1-2-5-10µm Spec., Certified, Mount C
each
884.50
Qty:
618-3D
CD Structure 1-2-5-10µm Spec., Certified, Mount D
each
884.50
Qty:
618-3E
CD Structure 1-2-5-10µm Spec., Certified, Mount E
each
884.50
Qty:
618-3G
CD Structure 1-2-5-10µm Spec., Certified, Mount G, You Supply Mount
each
982.50
Qty:
618-3K
CD Structure 1-2-5-10µm Spec., Certified, Mount K
each
884.50
Qty:
618-3L
CD Structure 1-2-5-10µm Spec., Certified, Mount L
each
884.50
Qty:
618-3M
CD Structure 1-2-5-10µm Spec., Certified, Mount M
each
884.50
Qty:


critical dimension specimen
 Version with a 10-5-2-1-0.5um structure

This CD calibration test specimen comprises of 5 line patterns, each one clearly identified by its pitch. Each pattern has five bars and spaces of equal pitch:10.0um, 5.0um, 2.0um, 1.0um and 0.5um. The central line area may be used for AFM measurements. The patterns are etched into Si with a depth of approximately 200nm. There is no coating on the Si surface.

Ordering Information:
Prod #DescriptionUnitPriceOrder / Quote
Unmounted
618-5
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, unmounted
each
$98.75
Qty:
618-7
CD Structure 10-5-2-1-0.5um Specimen, certified traceable by German Physikalische Technical Bundesanstalt, unmounted
each
1,525.50
Qty:
Mounted, Non-certified: (see mount selections, types A-M )
618-5A
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount A
each
114.75
Qty:
618-5B
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount B
each
114.75
Qty:
618-5C
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount C
each
114.75
Qty:
618-5D
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount D
each
114.75
Qty:
618-5E
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount E
each
114.75
Qty:
618-5G
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount G, You Supply Mount
each
114.75
Qty:
618-5K
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount K
each
114.75
Qty:
618-5L
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount L
each
114.75
Qty:
618-5M
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount M
each
114.75
Qty:
Mounted, Certified by the German Physikalische Technische Bundesanstalt (see mount selections, types A-M )
618-7A
CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount A
each
1,545.50
Qty:
618-7B
CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount B
each
1,545.50
Qty:
618-7C
CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount C
each
1,545.50
Qty:
618-7D
CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount D
each
1,545.50
Qty:
618-7E
CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount E
each
1,545.50
Qty:
618-7G
CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount G, You Supply Mount
each
1,545.50
Qty:
618-7K
CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount K
each
1,545.50
Qty:
618-7L
CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount L
each
1,545.50
Qty:
618-7M
CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount M
each
1,545.50
Qty:



critical dimension specimen
(overview with location bars)

see mount selections, types A-M

Version with a 500-200-100nm structure

critical dimension specimen
(structure)

This advanced CD calibration test specimen is suited for calibrating smaller structures. The 500-200-100nm test specimen comprises 3 line patterns, each identified by its pitch. Each pattern has 5 bars and spaces with equal pitch: 500nm, 200nm and 100nm. The central area may be used for AFM measurements. The patterns are etched into Si with a depth of approx 45-50nm. There is no coating on the Si surface. On some CD calibration targets one of the 100nm lines can be missing, this is a normal occurrence and does not influence performance of the specimen.

Ordering Information:
Prod #DescriptionUnitPriceOrder / Quote
Unmounted
618-4
CD Structure 500-200-100nm Specimen, non-certified, unmounted
each
$715.40
Qty:
Mounted, Non-certified: (see mount selections, types A-M )
618-4A
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount A
each
735.40
Qty:
618-4B
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount B
each
735.40
Qty:
618-4C
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount C
each
735.40
Qty:
618-4D
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount D
each
735.40
Qty:
618-4E
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount E
each
735.40
Qty:
618-4G
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount G, You Supply Mount
each
735.40
Qty:
618-4K
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount K
each
735.40
Qty:
618-4L
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount L
each
735.40
Qty:
618-4M
CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount M
each
735.40
Qty:



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Page Last Updated: December 29, 2008