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SEM Magnification Calibration

Scanning Electron Microscopy Test Specimens

PELCO® CDMS - Critical Dimension Magnification Standards
Critical Dimension (CD) Calibration Test Specimen
MetroChip Microscope Calibration Standard
MRS-3 Reference Standard
MRS-4 Magnification Standard and Stage Micrometer
MRS-5 Magnification Reference Standard
New SEM Calibration Specimens QUANTIFOIL®
High Magnification, High Resolution Calibration Reference and Traceable Standard for SEM, AFM, Auger, and FIB

Planotec Silicon Test Specimen - Low-Mag Calibration Ruler
Grating Replica, Waffle - Agar Copper Mesh

See information on
mounts A-P

Planotec Silicon Test Specimen

Useful for magnification calibration or image distortion check in SEM and LM.

Single crystal silicon, 5mm x 5mm. The squares repeat every 10µm (0.01mm). The dividing lines are about 1.9µm wide, formed by electron beam lithography. A broader marking line is written every 500µm (0.5mm) which is useful for light microscopy. Lines are etched, and approximately 300nm deep. Available unmounted or mounted on SEM specimen mounts.

Many types of samples can be mounted directly onto the Silicon Test Specimen so that an internal calibration is obtained in the image.

Thickness: 675µm
Si crystal orientation: <100>
Wafer type: P-type/boron doped
Resistance: 1-30 Ohm/cm

To avoid contamination of test and calibration samples, we recommend storing these under vacuum. For the standard SEM pin mounts, the #16179 PELCO® SEM Sample Stub Vacuum Desiccator would be ideal.

A certificate of calibration can be supplied for the Silicon Test Specimen at extra cost. The guaranteed accuracy is 1%. The basic reference specimen is calibrated by the National Physical Laboratory, of England, by laser beam interferometry.
PELCO® Technical Notes, Planotec Test Specimen (pdf)

Prod # Description Unit Qty Price Order / Quote

615
Planotec Silicon test specimen, unmounted
each
1-9
$79.45

Qty:

10+
71.50

Prod # Description Unit Price Order / Quote

615-A
Planotec Silicon test specimen, Mount A
each
$99.80

Qty:

615-B
Planotec Silicon test specimen, Mount B
each
99.80

Qty:

615-C
Planotec Silicon test specimen, Mount C
each
99.80

Qty:

615-D
Planotec Silicon test specimen, Mount D
each
99.80

Qty:

615-E
Planotec Silicon test specimen, Mount E
each
99.80

Qty:

615-F
Planotec Silicon test specimen, Mount F
each
99.80

Qty:

615-G
Planotec Silicon test specimen, Mount G, you supply mount
each
199.80

Qty:

615-K
Planotec Silicon test specimen, Mount K
each
99.80

Qty:

615-L
Planotec Silicon test specimen, Mount L
each
99.80

Qty:

615-M
Planotec Silicon test specimen, Mount M
each
99.80

Qty:

615-O
Planotec Silicon test specimen, Mount O
each
99.80

Qty:

615-P
Planotec Silicon test specimen, Mount P
each
99.80

Qty:

615-5
Planotec test specimen for incident light microscopy, mounted on a blackened glass slide
each
128.55

Qty:

Planotec Silicon Test Specimens with calibration certificate for mounted test specimens only

Prod # Description Unit Price Order / Quote

660-615-A
Planotec Silicon test specimen, certified, Mount A
each
$449.75

Qty:

660-615-B
Planotec Silicon test specimen, certified, Mount B
each
449.75

Qty:

660-615-C
Planotec Silicon test specimen, certified, Mount C
each
449.75

Qty:

660-615-D
Planotec Silicon test specimen, certified, Mount D
each
449.75

Qty:

660-615-E
Planotec Silicon test specimen, certified, Mount E
each
449.75

Qty:

660-615-F
Planotec Silicon test specimen, certified, Mount F
each
449.75

Qty:

660-615-G
Planotec Silicon test specimen, certified, Mount G, you supply mount
each
485.50

Qty:

660-615-K
Planotec Silicon test specimen, certified, Mount K
each
449.75

Qty:

660-615-L
Planotec Silicon test specimen, certified, Mount L
each
449.75

Qty:

660-615-M
Planotec Silicon test specimen, certified, Mount M
each
449.75

Qty:

660-615-O
Planotec Silicon test specimen, certified, Mount O
each
449.75

Qty:

660-615-P
Planotec Silicon test specimen, certified, Mount P
each
449.75

Qty:

660-615-5
Planotec test specimen for incident light microscopy, certified, mounted on a blackened glass slide
each
494.50

Qty:

Low-Mag Calibration Ruler

100 markings, divisions 0.01mm on disc

Calibration ruler on 1/8" (3.2mm) nickel-plated copper disc. 1mm long scale with 100 markings, with 0.01mm divisions with an accuracy of +/- 0.0005mm or better. Available unmounted, or mounted on SEM mounts. see information on mounts A-P
PELCO® Technical Notes, SEM Low Magnification Ruler Disc (pdf)

Prod # Description Unit Qty Price Order / Quote

630
Lo-mag Calibration Disc, Unmounted
each
1-9
$35.50

Qty:

10+
29.70

Prod # Description Unit Price Order / Quote

630-A
Lo-mag Calibration Disc, Mount A
each
$35.00

Qty:

630-B
Lo-mag Calibration Disc, Mount B
each
35.00

Qty:

630-C
Lo-mag Calibration Disc, Mount C
each
35.00

Qty:

630-D
Lo-mag Calibration Disc, Mount D
each
35.00

Qty:

630-E
Lo-mag Calibration Disc, Mount E
each
35.00

Qty:

630-F
Lo-mag Calibration Disc, Mount F
each
35.00

Qty:

630-G
Lo-mag Calibration Disc, Mount G, You Supply Mount
each
133.00

Qty:

630-K
Lo-mag Calibration Disc, Mount K
each
35.00

Qty:

630-L
Lo-mag Calibration Disc, Mount L
each
35.00

Qty:

630-M
Lo-mag Calibration Disc, Mount M
each
35.00

Qty:

waffle grating replica
See information on
mounts A-P

Grating Replica, Waffle

(Crossed-Lines)

Carbon replica with Au/Pd shadowing prepared on a mount of your choice and carefully packaged. 2,160 lines per millimeter. See our number 252 Magnification Calibration slide-rule for quick assistance in obtaining magnification based on space counts of this product. Available as unmounted standard or mounted on a SEM mount.

PELCO® Technical Notes, SEM Magnification Calibration Diffraction Grating Replica (PDF 712KB)

Prod # Description Unit Price Order / Quote

604
SEM Grating Replica, Unmounted
each
$48.50

Qty:

604-A
SEM Grating Replica, Mount A
each
53.50

Qty:

604-B
SEM Grating Replica, Mount B
each
53.50

Qty:

604-C
SEM Grating Replica, Mount C
each
53.50

Qty:

604-D
SEM Grating Replica, Mount D
each
53.50

Qty:

604-E
SEM Grating Replica, Mount E
each
53.50

Qty:

604-F
SEM Grating Replica, Mount F
each
53.50

Qty:

604-G
SEM Grating Replica, Mount G, You Supply Mount
each
151.50

Qty:

604-K
SEM Grating Replica, Mount K
each
53.50

Qty:

604-L
SEM Grating Replica, Mount L
each
53.50

Qty:

604-M
SEM Grating Replica, Mount M
each
53.50

Qty:

604-O
SEM Grating Replica, Mount O
each
53.50

Qty:

604-P
SEM Grating Replica, Mount P
each
53.50

Qty:

Fine Copper Mesh on Folding Grids (unmounted)

For low magnification calibration of scanning electron microscopes and the low magnification range of transmission electron microscopes. The fine mesh is held within a folding grid.
Available with 1000 mesh (25µm pitch) and 2000 mesh (12.5µm pitch).

Prod # Description Unit Price Order / Quote

631-A, 1000 mesh has a 50% open area, pitch 25µm, hole 19µm, bar 7 µm.

631-A
Agar 1000 mesh on 3mm Folding Grid
each
$38.50

Qty:

631-C, 2000 mesh has a 36% open area, pitch 12.5µm, hole 7.5µm, bar 5 µm.

631-C
Agar 2000 mesh on 3mm Folding Grid
each
36.50

Qty:

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