A complete selection of useful, precise, practical calibration and test specimens
for scanning probe microscopy (SPM, AFM and STM) applications. Included are calibration
specimens for Z-axis, X- or Y-axis, X/Y/Z direction, linearity and tip sharpness
parameters.
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Block Test Gratings for Z-axis
Selection of 3 block type test gratings with different step heights intended for Z-axis calibration of scanning probe microscopes and linearity measurements.
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Structure:
Pattern type:
Step heights:
Period:
Chip size:
Effective area: |
Si Wafer with SiO2 layer for grating
1-Dimensional (in Z-axis direction)
20±1nm for TGZ-20
115±2nm for TGZ-100
550±3nm for TGZ-500
3 ±0.01µm
5 x 5 x 0.5mm
Central square of 3 x 3mm |
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| Note: Values for step heights are nominal; actual step height is given with the product and could be ±5% |
| Prod #
| Description
| Unit
| Price
| Order / Quote
|
629-10
| Calibration grating TGZ-20, Z=18.5nm
| each
| $125.00
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| 629-20
| Calibration grating TGZ-100, Z=108.5nm
| each
| 125.00
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| 629-30
| Calibration grating TGZ-500, Z=535.5nm
| each
| 125.00
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Triangular Test Grating for X- or Y-axis
The TGT-1500 test grating is intended for SPM calibration in X- or Y-axis, determination of lateral and vertical scanner nonlinearity, detection of angular distortion and tip characterization.
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Structure:
Pattern type:
Edge angle:
Edge Radius:
Pattern Height:
Period:
Chip size:
Effective area: |
Si wafer with grating in top surface
1-D array of triangular steps with
precise linear and angular dimensions
70 degrees
≤10nm
1.5µm
3 ±0.01µm
5 x 5 x 0.5mm
Central square of 3 x 3mm |
 |
| Prod #
| Description
| Unit
| Price
| Order / Quote
|
629-40
| Test grating TGT-1500, 1.5µm
| each
| $245.00
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Test Grating for Tip Sharpness
The TGTZ-400 test grating is intended for 3-D visualization of the scanning tip, determination of tip
sharpness parameters, tip degradation and contamination control.
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Structure:
Pattern type:
Tip angle:
Tip radius:
Tip height:
Period:
Diagonal period:
Chip size:
Effective area: |
Si wafer with grating in top surface
Array of sharp tips
About 50 degrees
≤10nm
0.3 - 0.7µm
3 ±0.01µm
2.12µm
5 x 5 x 0.5mm
Central square of 2 x 2mm |
 |
| Prod #
| Description
| Unit
| Price
| Order / Quote
|
629-50
| Test grating TGTZ-400, 300-700nm tips
| each
| $245.00
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Test Grating for Lateral Calibration
The TG3D-3000/600 test grating with its 3-Dimensional array is intended for lateral calibration of
SPM scanners, detection of lateral nonlinearity, hysteresis, creep, cross-coupling effects and for
determination of the tip aspect ratio.
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Structure:
Pattern type:
Height:
Top square size:
Edge radius:
Period:
Chip size:
Effective area: |
Si wafer with grating in top surface
Chessboard like array of square
pillars with sharp undercut edges
0.3 - 0.6µm
1.2 x 1.2µm
≤10nm
3 ±0.05µm
5 x 5 x 0.5mm
Central square of 3 x 3mm |
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Note: Height and top square dimensions are given for information only (non calibrated values).
| Prod #
| Description
| Unit
| Price
| Order / Quote
|
629-60
| Test grating TG3D-3000/600, pillars
| each
| $245.00
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Test Grating for X-, Y- and Z-direction
The TG3D-3000/20 test grating with its truly 3-Dimensional structure is intended for simultaneous calibration in X-, Y- and Z-direction, lateral calibration of SPM scanners and detection of any lateral nonlinearity, hysteresis, creep and cross-coupling effects.
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Structure:
Pattern type:
Height:
Square size:
Period:
Chip size:
Effective area: |
Si wafer with SiO2 layer for grating
3-Dimensional array of small squares
20 ±1.5nm
1.5 ±0.15µm
3 ±0.05µm
5 x 5 x 0.5mm
Central square of 3 x 3mm |
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Note: The precision on the height is based on the measurement of 5 gratings (randomly selected from a batch of 300 gratings) by an SPM calibrated by a PTB certified TGZ-20 grating. The basic step height can vary from the specified one within 10% (example: step height can be 22 ±1.5nm).
| Prod #
| Description
| Unit
| Price
| Order / Quote
|
629-70
| Test grating TG3D-3000/20, squares
| each
| $425.00
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SiC-STEP Calibration Samples
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SiC/0.75
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SiC/1.5
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6H-SiC (0001) based calibration sample which is designed to perform easy calibrations of an
AFM scanner vertical movements in several nanometers interval. The simplicity of calibration
of the calibration process is provided by the nearly uniform distribution of half-monolayer
high steps (either 0.75 or 1.5nm) on the sample surface demonstrating both chemical and mechanical
stability. The step height corresponds to the half of the lattice constant of the 6H-SiC crystal
in the (0001) direction.
PELCO®
Technical Notes for SiC-STEP Calibration Sample (147K pdf)
|
| Specifications: |
SiC / 0.75 |
SiC / 1.5 |
| Structure: |
SiC with Steps |
| Single Step height: |
0.75nm |
1.5nm |
| Average inter step distance: |
0.15-0.4µm |
0.2-0.5µm |
| Misorientation of surface: |
~0.2° |
~0.3° |
| Average roughness of area between steps (terraces): |
0.09nm |
| Chip size: |
5 x 5 x 0.3mm |
SiC/0.75
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SiC/1.5
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| Prod #
| Description
| Unit
| Price
| Order / Quote
|
629-85
| SiC-STEP Calibration Sample with 0.75nm Step Height
| each
| $195.00
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| 629-90
| SiC-STEP Calibration Sample with 1.50nm Step Height
| each
| 195.00
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