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AFM, STM, SPM Calibration Specimens

A complete selection of useful, precise, practical calibration and test specimens for scanning probe microscopy (SPM, AFM and STM) applications. Included are calibration specimens for Z-axis, X- or Y-axis, X/Y/Z direction, linearity and tip sharpness parameters.

Block Test Gratings for Z-axis	Triangular Test Grating for X- or Y-axis	Test Grating for Tip Sharpness
Test Grating for Lateral Calibration	Test Grating for X-, Y- and Z-direction	Si-STEP Calibration Sample

AFM Atomic Force Microscopy Block Test Gratings for Z-axis

Block Test Gratings for Z-axis

Selection of 3 block type test gratings with different step heights intended for Z-axis calibration of scanning probe microscopes and linearity measurements.

Structure:
Pattern type:
Step heights:

Period:
Chip size:
Effective area:

Si Wafer with SiO2 layer for grating
1-Dimensional (in Z-axis direction)
21.5±1nm for TGZ-20
113.5±2nm for TGZ-100
540±3nm for TGZ-500
3 ±0.01µm
5 x 5 x 0.5mm
Central square of 3 x 3mm

Prod # Description Unit Price Order / Quote

629-10
Calibration grating TGZ-20, Z=18.5nm
each
$135.00

Qty:

629-20
Calibration grating TGZ-100, Z=108.5nm
each
135.00

Qty:

629-30
Calibration grating TGZ-500, Z=535.5nm
each
135.00

Qty:

afm Test grating TGT-1500, 1.5µm

Triangular Test Grating for X- or Y-axis

The TGT-1500 test grating is intended for SPM calibration in X- or Y-axis, determination of lateral and vertical scanner nonlinearity, detection of angular distortion and tip characterization.

Structure:
Pattern type:

Edge angle:
Edge Radius:
Pattern Height:
Period:
Chip size:
Effective area:

Si wafer with grating in top surface
1-D array of triangular steps with
precise linear and angular dimensions
70 degrees
≤10nm
1.5µm
3 ±0.01µm
5 x 5 x 0.5mm
Central square of 3 x 3mm

AFM Atomic Force Microscopy Triangular Test Grating for X- or Y-axis

Prod # Description Unit Price Order / Quote

629-40
Test grating TGT-1500, 1.5µm
each
$265.00

Qty:

atomic force microscopy Test Grating for Tip Sharpness

Test Grating for Tip Sharpness

The TGTZ-400 test grating is intended for 3-D visualization of the scanning tip, determination of tip sharpness parameters, tip degradation and contamination control.

Structure:
Pattern type:
Tip angle:
Tip radius:
Tip height:
Period:
Diagonal period:
Chip size:
Effective area:

Si wafer with grating in top surface
Array of sharp tips
About 50 degrees
≤10nm
0.3 - 0.7µm
3 ±0.01µm
2.12µm
5 x 5 x 0.5mm
Central square of 2 x 2mm

AFM Atomic Force Microscopy Test grating TGTZ-400, 300-500nm tips

Prod # Description Unit Price Order / Quote

629-50
Test grating TGTZ-400, 300-700nm tips
each
$265.00

Qty:

afm Test grating TG3D-3000/600, pillars

Test Grating for Lateral Calibration

The TG3D-3000/600 test grating with its 3-Dimensional array is intended for lateral calibration of SPM scanners, detection of lateral nonlinearity, hysteresis, creep, cross-coupling effects and for determination of the tip aspect ratio.

Structure:
Pattern type:

Height:
Top square size:
Edge radius:
Period:
Chip size:
Effective area:

Si wafer with grating in top surface
Chessboard like array of square
pillars with sharp undercut edges
0.3 - 0.6µm
1.2 x 1.2µm
≤10nm
3 ±0.05µm
5 x 5 x 0.5mm
Central square of 3 x 3mm

AFM Atomic Force Microscopy Test Grating for Lateral Calibration

Note: Height and top square dimensions are giving for information only (non calibrated values).

Prod # Description Unit Price Order / Quote

629-60
Test grating TG3D-3000/600, pillars
each
$265.00

Qty:

AFM Test Grating for X-, Y- and Z-direction

Test Grating for X-, Y- and Z-direction

The TG3D-3000/20 test grating with its truly 3-Dimensional structure is intended for simultaneous calibration in X-, Y- and Z-direction, lateral calibration of SPM scanners and detection of any lateral nonlinearity, hysteresis, creep and cross-coupling effects.

Structure:
Pattern type:
Height:
Square size:
Period:
Chip size:
Effective area:

Si wafer with SiO2 layer for grating
3-Dimensional array of small squares
20 ±1.5nm
1.5 ±0.15µm
3 ±0.05µm
5 x 5 x 0.5mm
Central square of 3 x 3mm

AFM Atomic Force Microscopy Test Grating for X-, Y- and Z-direction

Note: The precision on the height is based on the measurement of 5 gratings (randomly selected from a batch of 300 gratings) by an SPM calibrated by a PTB certified TGZ-20 grating. The basic step height can vary from the specified one within 10% (example: step height can be 22 ±1.5nm).

Prod # Description Unit Price Order / Quote

629-70
Test grating TG3D-3000/20, squares
each
$465.00

Qty:

afm atomic force microscopy Si-STEP Calibration Sample

Si-STEP Calibration Sample

The Si-STEP silicon test sample with echeloned pattern for AFM applications is designed on the base of a silicon (111) surface with verified distribution of monoatomic steps for height calibration in angstrom and single nanometer intervals. The Si-STEP calibration sample can also be used as a flat sample substrate for nanoparticles.

PELCO® Technical Notes for Si-STEP Calibration Sample (334k pdf)

Structure:
Average interstep distance:
Single atom step height:
Mis-orientation from (111):
Inter-step roughness:
Chip size:

Silicon with steps
0.5-2µm
0.314nm
~1 degree
0.06nm
1 x 4 x 0.3mm

afm atomic force microscopy Si-STEP Calibration Sample

Prod # Description Unit Price Order / Quote

629-80
Si-STEP Calibration Sample
each
$200.00

Qty:

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