PELCO^® CDMS - Critical Dimension Magnification Standards

Easy to use and very useful for quick and precise SEM, FESEM, FIB and CD-SEM magnification calibration.

Unique, economically priced, yet fully featured and traceable calibration standards for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques.

The PELCO^® CDMS calibration standard is available with two features size ranges, which are both offered as traceable and certified standards, making a total of 4 versions:

PELCO® CDMS-1T; fully traceable with features from 2.0mm to 1um for a magnification range from 10x - 20,000x; ideal for desk top SEMs and low to medium magnification applications
Representative CDMS-1T Traceable Certificate (278KB PDF)

PELCO® CDMS -0.1T; fully traceable with features from 2.0mm to 100nm for a magnification range up to 10 - 200,000x; for all SEM and most FESEM applications
Representative CDMS-0.1T Traceable Certificate (278KB PDF)

PELCO® CDMS-1C; individually certified against a NIST standard with features from 2.0mm to 1µm for a magnification range from 10x - 20,000x; ideal for desk top SEMs and low to medium magnification applications
Representative CDMS-1C Conformance Certificate (129KB PDF)

PELCO® CDMS-0.1C; individually certified against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10 - 200,000x; for all SEM and most FESEM applications
Representative CDMS-0.1C Conformance Certificate (132KB PDF)

PELCO® Technical Notes for CDMS - Critical Dimension Magnification Standards (149KB PDF)

Comparison Table Below

Feature Size Range:

Feature sizes for the PELCO^® CDMS-1T and -1C are:
2mm, 1mm, 0.5m, 0.25mm, 10µm, 5µm, 2µm and 1µm

Feature sizes for the PELCO^® CDMS-0.1T & 0.1C are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm.

The PELCO^® CDMS Critical Dimensions and Magnification Standards are made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5um and a combination of 50nm gold over 20nm chromium for the features sizes from 2um to 100nm. The Cr and Au/Cr on Si provides excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner.

The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5x2.5mm with a thickness of 625µm ±25µm. There is no coating on the Si surface. Each PELCO^® CDMS calibration standard has a unique identification number.

They are available either unmounted or mounted on SEM holders A-Q.

The specimen may also be prepared on a custom mount of your choice.

PELCO^® CDMS-1T

NIST traceable with features from 2mm to 1µm for magnification 10-20,000x (ideal for desktop SEM)

see mount selections, types A-Q

Prod #	Description	Unit	Price	Order / Quote
682-1	PELCO® CDMS-1T, 2mm - 1µm, traceable, unmounted	each	$70.00	Qty:
682-1A	PELCO® CDMS-1T, 2mm - 1µm, traceable, Mount A	each	79.50	Qty:
682-1B	PELCO® CDMS-1T, 2mm - 1µm, traceable, Mount B	each	79.50	Qty:
682-1C	PELCO® CDMS-1T, 2mm - 1µm, traceable, Mount C	each	79.50	Qty:
682-1D	PELCO® CDMS-1T, 2mm - 1µm, traceable, Mount D	each	79.50	Qty:
682-1E	PELCO® CDMS-1T, 2mm - 1µm, traceable, Mount E	each	79.50	Qty:
682-1F	PELCO® CDMS-1T, 2mm - 1µm, traceable, Mount F	each	79.50	Qty:
682-1G	PELCO® CDMS-1T, 2mm - 1µm, traceable, you supply mount	each	170.00	Qty:
682-1K	PELCO® CDMS-1T, 2mm - 1µm, traceable, Mount K	each	79.50	Qty:
682-1L	PELCO® CDMS-1T, 2mm - 1µm, traceable, Mount L	each	79.50	Qty:
682-1M	PELCO® CDMS-1T, 2mm - 1µm, traceable, Mount M	each	79.50	Qty:
682-1O	PELCO® CDMS-1T, 2mm - 1µm, traceable, Mount O	each	79.50	Qty:
682-1P	PELCO® CDMS-1T, 2mm - 1µm, traceable, Mount P	each	79.50	Qty:
682-1Q	PELCO® CDMS-1T, 2mm - 1µm, traceable, Mount Q	each	79.50	Qty:

PELCO^® CDMS-0.1T

NIST traceable with features from 2mm to 100nm for magnification 10-200,000x for SE, FESEM and FIB

see mount selections, types A-Q

Prod #	Description	Unit	Price	Order / Quote
683-01	PELCO® CDMS-0.1T, 2mm - 100nm, traceable, unmounted	each	$375.50	Qty:
683-01A	PELCO® CDMS-0.1T, 2mm - 100nm, traceable, Mount A	each	385.50	Qty:
683-01B	PELCO® CDMS-0.1T, 2mm - 100nm, traceable, Mount B	each	385.50	Qty:
683-01C	PELCO® CDMS-0.1T, 2mm - 100nm, traceable, Mount C	each	385.50	Qty:
683-01D	PELCO® CDMS-0.1T, 2mm - 100nm, traceable, Mount D	each	385.50	Qty:
683-01E	PELCO® CDMS-0.1T, 2mm - 100nm, traceable, Mount E	each	385.50	Qty:
683-01F	PELCO® CDMS-0.1T, 2mm - 100nm, traceable, Mount F	each	385.50	Qty:
683-01G	PELCO® CDMS-0.1T, 2mm - 100nm, traceable, you supply mount	each	475.50	Qty:
683-01K	PELCO® CDMS-0.1T, 2mm - 100nm, traceable, Mount K	each	385.50	Qty:
683-01L	PELCO® CDMS-0.1T, 2mm - 100nm, traceable, Mount L	each	385.50	Qty:
683-01M	PELCO® CDMS-0.1T, 2mm - 100nm, traceable, Mount M	each	385.50	Qty:
683-01O	PELCO® CDMS-0.1T, 2mm - 100nm, traceable, Mount O	each	385.50	Qty:
683-01P	PELCO® CDMS-0.1T, 2mm - 100nm, traceable, Mount P	each	385.50	Qty:
683-01Q	PELCO® CDMS-0.1T, 2mm - 100nm, traceable, Mount Q	each	385.50	Qty:

PELCO^® CDMS-1C

Certified against NIST standard with features from 2mm to 1µm for magnification 10-20,000x (ideal for desktop SEM)

see mount selections, types A-Q

Prod #	Description	Unit	Price	Order / Quote
686-1	PELCO® CDMS-1C, 2mm - 1µm, certified, unmounted	each	$585.50	Qty:
686-1A	PELCO® CDMS-1C, 2mm - 1µm, certified, Mount A	each	595.50	Qty:
686-1B	PELCO® CDMS-1C, 2mm - 1µm, certified, Mount B	each	595.50	Qty:
686-1C	PELCO® CDMS-1C, 2mm - 1µm, certified, Mount C	each	595.50	Qty:
686-1D	PELCO® CDMS-1C, 2mm - 1µm, certified, Mount D	each	595.50	Qty:
686-1E	PELCO® CDMS-1C, 2mm - 1µm, certified, Mount E	each	595.50	Qty:
686-1F	PELCO® CDMS-1C, 2mm - 1µm, certified, Mount F	each	595.50	Qty:
686-1G	PELCO® CDMS-1C, 2mm - 1µm, certified, you supply mount	each	685.50	Qty:
686-1K	PELCO® CDMS-1C, 2mm - 1µm, certified, Mount K	each	595.50	Qty:
686-1L	PELCO® CDMS-1C, 2mm - 1µm, certified, Mount L	each	595.50	Qty:
686-1M	PELCO® CDMS-1C, 2mm - 1µm, certified, Mount M	each	595.50	Qty:
686-1O	PELCO® CDMS-1C, 2mm - 1µm, certified, Mount O	each	595.50	Qty:
686-1P	PELCO® CDMS-1C, 2mm - 1µm, certified, Mount P	each	595.50	Qty:
686-1Q	PELCO® CDMS-1C, 2mm - 1µm, certified, Mount Q	each	595.50	Qty:

PELCO^® CDMS-0.1C

Certified against NIST standard with features from 2mm to 100nm for magnification 10-200,000x for SE, FESEM and FIB

see mount selections, types A-Q

Prod #	Description	Unit	Price	Order / Quote
687-01	PELCO® CDMS-0.1C, 2mm - 100nm, certified, unmounted	each	$835.50	Qty:
687-01A	PELCO® CDMS-0.1C, 2mm - 100nm, certified,, Mount A	each	845.50	Qty:
687-01B	PELCO® CDMS-0.1C, 2mm - 100nm, certified, Mount B	each	845.50	Qty:
687-01C	PELCO® CDMS-0.1C, 2mm - 100nm, certified, Mount C	each	845.50	Qty:
687-01D	PELCO® CDMS-0.1C, 2mm - 100nm, certified, Mount D	each	845.50	Qty:
687-01E	PELCO® CDMS-0.1C, 2mm - 100nm, certified, Mount E	each	845.50	Qty:
687-01F	PELCO® CDMS-0.1C, 2mm - 100nm, certified, Mount F	each	845.50	Qty:
687-01G	PELCO® CDMS-0.1C, 2mm - 100nm, certified, you supply mount	each	945.50	Qty:
687-01K	PELCO® CDMS-0.1C, 2mm - 100nm, certified, Mount K	each	845.50	Qty:
687-01L	PELCO® CDMS-0.1C, 2mm - 100nm, certified, Mount L	each	845.50	Qty:
687-01M	PELCO® CDMS-0.1C, 2mm - 100nm, certified, Mount M	each	845.50	Qty:
687-01O	PELCO® CDMS-0.1C, 2mm - 100nm, certified, Mount O	each	845.50	Qty:
687-01P	PELCO® CDMS-0.1C, 2mm - 100nm, certified, Mount P	each	845.50	Qty:
687-01Q	PELCO® CDMS-0.1C, 2mm - 100nm, certified, Mount Q	each	845.50	Qty: