Selected MRS-4 Patterns

Fig. 1
50µm pitch pattern. The overall width is 1mm. Measure magnification using multiple pitches totaling 0.950mm, as above.

Fig. 2
1µm pitch pattern. 16 of these patterns are located at the outside of the 1mm box.

Fig. 3
2µm pitch pattern. 3 sets of this pattern (with one in the exact center) can be seen in Fig. 1.

Fig. 4
1/2µm pitch pattern. Overall size is 40µm. 4 of these patterns are located in the southeast corner of the 3mm box.

Fig. 5
1/2µm pitch pattern. Edge variation is approximately 20nm.

Fig. 6
Circle pattern from 2 to 100µm. 4 sets are included.

Fig. 7
Rectangles w/squares on the NW-SE diagonal. This pattern has 70 - 120µm in 10µm increments.

Fig. 8
Rectangles w/squares on the NW-SE diagonal. This pattern has 30 - 75µm in 5µm increments. Also included are rectangles from 1–31µm in 1µm increments.

Fig. 9
The “ruler” has 1µm increments over a 6mm distance in both X and Y axes. This pitch pattern can be used at any magnification.