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Electron Flight Simulator-E

Now you can model beam scatter in your environmental or low vacuum SEM

In addition to all the standard features in Electron Flight Simulator, version E gives you the ability to see beam scatter in the environmental scanning electron microscope under a wide range of conditions.

When a gas is introduced into the chamber of an environmental or low vacuum scanning electron microscope, the gas molecules cause the beam to scatter. The result is that some of the electrons in the beam will strike the sample away from the original beam spot. Since these "stray" electrons will generate X-rays, your analytical results will contain errors. This problem gets worse at higher chamber pressures and longer working distances.

Version E lets you model beam scatter by varying the chamber pressure, gas type, and working distance. Use the model to select the best combinations of settings before you even run your sample. This way you will get the most accurate results.

Key Benefits

Examples

Example 1 shows beam scatter in air at 1 Torr overlaid with a histogram showing intensity of the scattered beam vs. lateral position (distance of scatter). Green center portion of the histogram represents the effective beam diameter for the chosen operating conditions of working distance, gas pressure, gas type, and accelerating voltage

Example 2 shows how changes in working distance can determine how much the beam scatters, 4 views

Example 3 shows how changes in chamber pressure can determine how much the beam scatters, 4 views

Example 4 shows how changes in gas type can determine how much the beam scatters, 4 views

Example 5 shows how changes in accelerating voltage can determine how much the beam scatters, 4 views

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