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AutoGlow Plasma Cleaning System

efficient, powerful and easy-to-use table-top lab system

AutoGlow Plasma Cleaning System shown with one built-in Gas Control Valve / Flow Meter, optional

Full List of Specifications

The AutoGlow Plasma Cleaning System is an automatic tuning, 300 watt, table-top RF plasma system that provides an extremely efficient, uniform plasma for lab applications. It has been designed with the latest developments in RF technology to allow users a safe and rugged RF plasma system at a reasonable price. This flexible system with variable power settings is suitable for R&D centers, universities, laboratories and small production facilities, who will find the AutoGlow Plasma Cleaning System a useful system for their plasma needs.

Applications

Surface cleaning for thin film applications
Cleaning of optical devices, medial parts
Plasma ashing for EDX analysis, asbestos analysis
EM sample preparation
Surface etching
Cleaning of electronic circuit boards and components
Solar cells

Plasma Chamber

The plasma chamber is made of high purity quartz that is resistant to chemicals and easy to clean. The chamber design ensures the most efficient, uniform plasma processing.

Power and Matching Network

The AutoGlow Plasma System is equipped with an automatic impedance matching network which works with the RF power settings selected by the user. The auto-matching network makes the system easy to use and will give consistent results. RF power is available up to 300 watts.

Process Control

The AutoGlow control module monitors chamber pressure, forward power, reflected power, RF set point and power level. Up to three different gases can be used with the various options, utilizing Gas Control Valves and Flow Meters that provide enhanced process recipe flexibility. The system provides automatic operation and ensures precise, reproducible process conditions.

Instrument Safety

The inherent design of the AutoGlow comprises RF containment, few moving parts and the latest in RF technology to guarantee safe and reliable operation. Further safety features are a termination button for RF power and gas flow and safety interlocks to prevent activation of RF power and gas flow when the chamber door is open.

Gas Control Valves / Flow Meters (options available with 1, 2 or 3)

There are 3 Gas Control options that are available: for 1, 2 or 3 gas inputs. The units with optional, built-in Gas Control Valves / Flow Meters comprise precision flow meters and gas valves to allow for precise pressure control with up to three different process gases.

Vacuum pumping system (optional)

Recommended vacuum pumping system would be a dual stage chemical rotary pump with a pumping speed of 6m³/hr (100 l/min or 3.5 CFM). The pump must be charged with Krytox or Fomblin pumping fluid for use with oxygen.

Features and benefits of the AutoGlow

Up to 300 watt RF generator - variable power setting with enough reserve to accomplish to task
Minimal reflected power - accomplished by state of the art RF matching network and RF generator, delivers improved uniformity and reduces processing time
Quick auto tuning with solid state detector - enables automatic sample processing without the need for constant manual tuning
High purity quartz chamber - to ensure reliable processing
Uniform plasma - for consistent results
Pressure output reading - operator can monitor chamber pressure relative to gas flow
Displays for Forward Power, Reflected Power, RF Set Point and Pressure - easy operation and quick processing
Safe design - includes the latest safety features
Optional, built-in gas control valve/flow meter(s) - metered gas flow options for one, two or three process gases

AutoGlow with 1, 2 or 3 Gas Control Modules

The AutoGlow may be ordered with 1, 2 or 3 Built-in, Gas Control Valves/Flow Meters. See additional options below.

Prod #

Description

Unit

Price

Order / Quote

AutoGlow Plasma Cleaning System without Control Valves/Flow Meters

94000

AutoGlow Plasma Cleaning System (if Gas Control valves are needed, ONE of the three options below must be ordered at the same time)

each

P.O.R.

Qty:

AutoGlow Plasma Cleaning System optional Control Valves/Flow Meters

94010-10

One Gas Control Valve/Flow Meter (must be ordered with 94000)

each

2,700.00

Qty:

94010-20

Two Gas Control Valves/Flow Meters (must be ordered with 94000)

each

P.O.R.

Qty:

94010-30

Three Gas Control Valves/Flow Meters (must be ordered with 94000)

each

P.O.R.

Qty:

94020

3.8CFM chemical pumping system charged with Krytox pumping fluid

each

P.O.R.

Qty:

Consumables

Prod #

Description

Unit

Price

Order / Quote

94000-10

Quartz Process Chamber

each

$1,890.00

Qty:

94000-20

Quartz Process Chamber Door

each

1,020.00

Qty:

94000-22

Spare Parts Kit

each

344.00

Qty:

891-42

Krytox® 1525 pumping fluid, 1kg

each

375.00

Qty:

94020-10

Oil mist filter for 94020 pump

each

910.00

Qty:

AutoGlow Specifications

RF Power:	0 - 300W
RF frequency:	13.56 Mhz
RF matching network:	Manual/automatic tuning
Timer:	6 seconds to 999 hours
Digital Display (selected):	Forward Power, Reflected Power, RF Set Point, Pressure
Processing chamber:	High purity quartz, Ø5.8 x 7" (Ø147 x 177mm)
Vacuum pump connection:	KF25 (NW25)
Gas input connections:	0.25 FTP, 20psi
Weight:	83 lbs (37.7 kg)
Dimensions:	16 W x 24.12 D x 16 H" (406 x 613 x 406mm)
Enclosure material:	Zinc coated steel, polyurethane painted
Power requirements:	120-220VAC, 10A, 50/60Hz, single phase
Optional pumping system, requirements:	6 m3/hr (100l/min or 3.5 CFM) dual stage rotary pump charged with Krytox^® or Fomblin pumping fluid for use with oxygen
Optional Gas Control Valves / Flow Meters:	Models available with 1, 2 or 3 gas control valves / flow meters