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108 Auto/SE Sputter Coater
sample preparation for scanning electron microscopy
The 108 Auto/SE Sputter Coater; MTM-20 High Resolution Thickness Controller
108 Auto/SE Sputter CoaterThe 108 range of sputter coaters has been expanded to include a new Special Equipment version of the Automatic Coater Prod. No. 7002. The new 108 Auto/SE is intended for use in applications where the coating thickness must have a very high degree of uniformity. The chamber size has been increased to 150mm diameter to accommodate the Rotary-Planetary-Tilting stage developed for the 208HR High Resolution Coater model.The table below shows the specification differences between the 108 Auto/SE Sputter Coater, Prod. No. 7008 and the 108 Auto Sputter Coater, Prod. No. 7002: |
| 1. Increased chamber diameter Chamber size has been increased to permit coating of larger samples. Standard Chamber 150mm dia x 165mm |
Prod. No. 7008 108 Auto/SE 150mm dia |
Prod. No. 7002 108 Auto 120mm dia |
| 2. Target shutter Target shutter has been added to condition special targets prior to coating |
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| 3. Variable chamber geometry (option) Adjustable chamber height is used to improve coating uniformity and vary the deposition rate 0.01(-3) - 1.0nm/sec |
X | - |
| 4. Sample stage movements (option) Separate rotary, planetary and tilting sample movements to optimize coating distribution and coverage. |
X | - |
| 5. Superior sputter head design Stronger magnetic field for improved deposition rate. |
X | - |
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Rotary-Planetary-Tilting Stage with adjustable tilt (optional) |
 Rotary-Tilting Stage |
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The 108C Auto/SE Sputter Coater can be equipped with the optional R-P-T or R-T stage to accommodate multiple or large samples.
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 Dual-Vacset used to connect two coaters to one pump |
Desktop Dual-Vacset
The 108 Auto/SE Sputter Coater can be combined with the 108 Auto Carbon Coater using one pumping system. This has the advantage of using 2 dedicated units for sputtering and carbon coating without any cross contamination. |
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| Prod # | Description | Unit | Price | Order / Quote | |||
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| 108 Auto/SE Sputter Coater, 115VAC* |
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| 108 Auto/SE Sputter Coater, 220VAC* |
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| * The 108 Auto SE Sputter Coater includes: 91110 Gold Target; 7021 Specimen Mount Stage for 12 pin mounts; Telescopic Top Plate Support; 150mm dia. Chamber; Operating Instructions | |||||||
Specifications for the 108 Auto/SE Sputter Coater
Vacuum System for the 108 Auto/SE Sputter Coater
Rotary-Planetary-Tilting and Rotary-Tilting Stages
Sputter Targets
Accessories, Spares and Consumables for 108 Series Coaters
MTM-10 Thickness Monitor System