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Sputter Coater - Carbon Coater Accessories and Replacements

rotary vacuum pump
film thickness monitor
rotary planetary tilting stage
sputter targets
108 Series Coaters
208C Carbon Coater208HR Sputter Coater

rotary vacuum pump

Vacuum System for 108 Coaters

The #7010 Vacuum System for the 108 series coaters consists of a desktop compatible direct drive, compact 2-stage rotary pump on an anti-vibration tray, all metal connection kit and exhaust filter. This high performance pumping system give a fast pump-down (30 sec to 1 x 10-1 mbar) for shorter cycle times and better coating results. The same pump is also used on the 208HR and 208C high vacuum coaters as part of the complete system.

Rotary Pump Specifications:
Configuration High speed, direct drive, 2-stage
Pumping Speed 2.9m3/hr (2.5m3/hr)@ 60Hz (50Hz)
Ultimate vacuum 6 x 10-3 mbar
Rated Power 180 W @ 60Hz, 150 W @ 50 Hz
Flange connection NW/KF 16 (Intake and Exhaust
Operating fluid filling 0.4 ltr
Fluid type Pfeiffer P3
Voltage 100-120Vor 22-240V (specify on order)
Dual-Vacset
dual vacset
Dual-Vacset on Vacuum Pump
Two coaters connected to one pumping system
The Dual-Vacset Kit allows the connection of two Cressington 108 series Coaters to one vacuum pump. The most common configuration is a 108 Auto Sputter Coater and a 108C Auto Carbon Coater Connected to one pump. This set up has several advantages:
  • Two fully separate coating systems, each with optimized controls
  • High throughput, efficient set up
  • No cross-contamination between sputter (metal) and carbon coater
  • Cost effective (use one pump)

The Dual-Vacset Kit comprises a manual 3-way change-over ball valve and two NW-16 stainless flexible hoses with 2 each NW-16 centering rings (with o-rings) and NW-16 clamps.

Prod #DescriptionUnitPriceOrder / Quote
7010
Desktop Rotary Pump, High Speed, 115V, 60Hz
each
$2,975.00
Qty:
7010-220
Desktop Rotary Pump, High Speed, 220V, 50/60Hz
each
P.O.R.
Qty:
7030
Dual-Vacset (connect two coaters to one rotary pump) Kit
each
1,047.00
Qty:
7035
Dual-Vacset with pump
each
P.O.R.
Qty:
891-38
PFEIFFER P3 Oil for #7010 or #7010-220 Rotary Pump
1 liter
29.80
Qty:
9609
Exhaust Filter, for #7010 or 7010-220 Rotary Pump
each
54.45
Qty:


go to Vacuum Hose and Fittings

MTM-10 High Resolution Film Thickness Monitor
and MTM-20 High Resolution Film Thickness Controller

film thickness monitor

The High Resolution Thickness Monitor / Thickness Controller are based on the principle that the oscillating frequency of a quartz crystal is changed by the mass of a deposited film on its upper face. Electronically measuring this effect allows for a determination of the thickness of a deposited film. Once the density of the evaporated material is entered into the system, the thickness is measured to a resolution of 0.5nm on a four digit LED display having a range of 0-999.9 nanometers. The crystal and holder are mounted in the vacuum chamber and connected to the FTM Power Supply via the supplied vacuum feedthrough.
System Consists of:
  • MTM-10 Controller Box
  • BNC Cables / BNC Elbow
  • Oscillator Box
  • CS-108 Vacuum Feedthrough with BNC/SMB Connector and Integrated O-ring Seal
  • Crystal Head Cable 7" / 108mm
  • Crystal Monitor Head with M4 bracket screw size ø18 x 21mm height. Crystal area 6mm
The MTM-10 High Resolution Thickness Monitor will fit any of the Cressington sputter and carbon coating systems as well as other thin film vacuum coating systems which allow for a vacuum feedthrough of 10 mm diameter a on a plate thickness of 9 mm.

MTM-10 High Resolution Thickness Monitor

the economical way to assure thickness control

Accurate manual control of film thicknesses during deposition is difficult if not impossible. A white tile with a drop of oil is sometimes used for rough estimates of coating thicknesses of carbon but cannot be used when repetitious, reproducible coatings are required. Using instrumental settings is also not an accurate method because vacuum level (for sputtering) and time (for evaporation) are very critical parameters. The High Resolution Thickness Monitor offers repeatability of coating thicknesses, removes guesswork and is convenient. The use of a tooling factor allows for exact measurement of the thin films. The MTM-10 High Resolution Thickness Monitor works with many types of vacuum thin film coating equipment.
mtm-20 Tickness Controller

MTM-20 High Resolution Thickness Controller

The MTM-20 High Resolution Thickness Controller is specifically designed for the Cressington sputter coater systems and is fully compatible with the 108auto, 108auto/SE, 208HR sputter coater systems and with the DC-100 sputter supply for the 308R thin film coating system

MTM-10 High Resolution Thickness Monitor and
MTM-20 High Resolution Thickness Controller Specifications
General Specifications: Microprocessor based, 4-digit display, push-button zero
6MHz crystal with lifetime check
5 times per second update rate
Thickness Range: 0.0 - 999.9nm (pos/neg)
Resolution: 0.1nm for carbon
Density Range: 0.50 - 30.00g/cm3
Tooling Factor Range: 0.25 - 8.0
Processor Function: Four sets of values can be stored in memory under Density and four under Tooling for both the MTM-10 and MTM20
MTM-20 Controller: MTM-20 only: Programmable thickness termination function with termination interface cable on 108 auto, 208HR and DC-100
Termination facility range 0-999.9nm

Prod #DescriptionUnitPriceOrder / Quote
93004
MTM-10 High Resolution Thickness Monitor* 110VAC, 50/60Hz
each
$2,248.00
Qty:
93004-220
MTM-10 High Resolution Thickness Monitor* 220VAC, 50/60Hz
each
2,248.00
Qty:
93006
MTM-20 High Resolution Thickness Controller* 115VAC, 50/60Hz
each
P.O.R.
Qty:
93006-220
MTM-20 High Resolution Thickness Controller* 220VAC, 50/60Hz
each
P.O.R.
Qty:
93005
MTM-10 High Resolution Thickness Monitor, for RPT* 110VAC, 50/60Hz
each
2,348.00
Qty:
93005-220
MTM-10 High Resolution Thickness Monitor, for RPT* 220VAC, 50/60Hz
each
2,348.00
Qty:
93007
MTM-20 High Resolution Thickness Controller, for RPT* 115VAC, 50/60Hz
each
P.O.R.
Qty:
93007-220
MTM-20 High Resolution Thickness Controller, for RPT* 220VAC, 50/60Hz
each
P.O.R.
Qty:
93004-30
Oscillator for MTM-10/20
each
294.00
Qty:
93004-31
Ext BNC Cable for MTM-10/20, 3 ft. length
each
19.30
Qty:
93004-32
RF10 Vacuum Feedthrough for MTM-10/20
each
275.00
Qty:
93004-35
Crystal Holder for MTM-10/20
each
305.00
Qty:
93004-36
Crystal Holder Cable for MTM-10/20, 6 in. length (for 108)
each
29.80
Qty:
93004-37
Crystal Holder Cable for MTM-10/20, 12 in. length (for 108, SE, 208, 308))
each
42.00
Qty:
93008
Replacement Crystals for MTM-10/20
pkg/3
42.00
Qty:
93009
Replacement Crystals for MTM-10/20
pkg/10
93.30
Qty:
93004-10
Film Thickness Hardware Kit w/o MTM-10
each
860.00
Qty:
93004-12
Film Thickness Hardware Kit for RPT Stage w/o MTM-10
each
925.00
Qty:
*The MTM-10 High Resolution Thickness Monitor and MTM-20 High Resolution Thickness Controller include: Vacuum feedthrough; Crystal holder, test crystal; Instructions

Rotary-Planetary-Tilting and Rotary-Tilting Stages

Rotary-Planetary-Tilting Stage
with adjustable tilt (optional)
Rotary-Tilting Stage

There are two types of rotary stages for the Cressington 108/SE and 208 series of coaters available.

1. Rotary-Planetary-Tilting (R-P-T) stage; this stage offers multi-angle movements of a multiple samples for sputter coating and carbon coating evaporation. The R-P-T stage can be configured with 4 specific holder for most type of SEM mounts, large specimen mounts and cross sections, see the listing below. The R-P-T enables uniform and more conform coating on topographic samples than with a static stage and it enables coating of a large number of samples. The R-P-T fits all larger chamber configuration found on the 208 and the 108/SE series of Cressington coaters. With the special large sample adapters #8011 and #8011A, the R-P-T stage can be used as a rotary stage.
2. Rotary-Tilting (R-T) stage; this stage is mostly used for larger samples on the 208C and 108carbon/SE coaters. It is also useful for shadowing techniques on the 208C high vacuum turbo carbon coater. The R-T stage is configured to accommodate standard 1"x3" glass slides commonly used for making carbon support films.

Both the R-P-T and R-T stage are built into a 150mm diameter mounting collar to enable rapid configuration modifications. Also included glass and metal spacers for chamber height adjustment, variable rotation speed control, external tilt adjustment with locking lever. (Note: Tilt adjustment is 0-90 w/o thickness monitor sensor, but limited to 0-60 when the thickness monitor sensor is fitted).

Prod #DescriptionUnitPriceOrder / Quote
9524
Rotary-Planetary-Tilting (R-P-T) Stage (variable speed 9V battery powered)
each
P.O.R.
Qty:
9660
Rotary-Tilting (R-T) Stage (variable speed 9V battery powered)
each
P.O.R.
Qty:
Note: the above are battery driven unless Prod # 9631 or 9631-220 is used
9631
R-P-T or R-T 9VDC Converter Kit, 115VAC
each
110.00
Qty:
9631-220
R-P-T or R-T 9VDC Converter Kit, 220VAC
each
150.00
Qty:

Sample Holders for Rotary-Planetary-Tilting Stages
for use with the Cressington 308R-EM, 108 Auto/SE, 208HR, 208C

planetary stage sample holder for 6 x 12.5mm dia. pin mounts

Prod #DescriptionUnitPriceOrder / Quote
8012
Sample Holder for 6 x 12.5mm dia. pin mounts
each
$193.00
Qty:

308 vacuum evaporator specimen holder for 4 x 10mm dia. stubs

Prod #DescriptionUnitPriceOrder / Quote
8014
Sample Holder for 4 x 10mm dia. stubs
each
$193.00
Qty:

vacuum evaporator specimen holder for 4 x 15mm dia. stubs

Prod #DescriptionUnitPriceOrder / Quote
8015
Sample Holder for 4 x 15mm dia. stubs
each
$193.00
Qty:

metallographic mount for vacuum evaporator for 1 x 25mm dia. stub or metallographic mount

Prod #DescriptionUnitPriceOrder / Quote
8016
Sample Holder for 1 x 25mm dia. stub or metallographic mount
each
$193.00
Qty:

vacuum evaporator mount holder for 1 x 32mm dia. stub or metallographic mount

Prod #DescriptionUnitPriceOrder / Quote
8017
Sample Holder for 1 x 32mm dia. stub or metallographic mount
each
$193.00
Qty:

rotary planetary tilting stage holder for 4 x 12.5mm dia. stubs

Prod #DescriptionUnitPriceOrder / Quote
8018
Sample Holder for 4 x 12.5mm dia. stubs
each
$193.00
Qty:


Front

Back
 for 3 x M4 + 3 x 12.5mm dia. pin mounts

Prod #DescriptionUnitPriceOrder / Quote
8021
Sample Holder for 3 x M4 + 3 x 12.5mm dia. pin mounts
each
$193.00
Qty:

Prod #DescriptionUnitPriceOrder / Quote
8017A
Adapter for 32mm mount to 25mm mount
each
$82.00
Qty:

Large Sample Adapter
for R-P-T Stage

For temporary conversion into Rotary-Tilting stage, 4" (101.6mm) OD.

Prod #DescriptionUnitPriceOrder / Quote
8011
Large Sample Adapter for RPT Stage
each
$288.00
Qty:

large sample holder for RPT stage Cross Section Adapter
for R-P-T Stage (geological)

Holds three cross sections 22 x 47mm (.87 x 1.85")

Prod #DescriptionUnitPriceOrder / Quote
8011A
Cross Section Adapter for RPT Stage, holds 3 cross sections 22 x 47mm
each
$385.00
Qty:


Sputter Targets for 108 and 208 Series Sputter Coaters

Note: Please call or email for pricing on Targets, actual prices can vary due to changes of prices for precious metals.

Prod #DescriptionUnitPriceOrder / Quote
Practically speaking, our 57mm targets are the highest purity and best selection available for EM sputter coating.
91122
Aluminum Target, 99.999% Al (57mm x 0.2mm) (208HR only)
each
$140.00
Qty:
8074
Chromium Target, 99.99% Cr (57mm x 3.2mm) (208HR only)
each
696.00
Qty:
91117
Copper Target, 99.99% Cu (57mm x .076mm)
each
185.00
Qty:
8077
Copper Target, 99.99% Cu (57mm x 0.2mm)
each
165.00
Qty:
91110
Gold Target, 99.99% Au (57mm x 0.1mm)
each
535.00
Qty:
8071
Gold Target, 99.99% Au (57mm x 0.2mm)
each
945.00
Qty:
91112
Gold/Palladium Target, 99.99% Au:Pd 60/40 ratio (57mm x 0.1mm)
each
530.00
Qty:
91111
Gold/Palladium Target, 99.99% Au:Pd 60/40 ratio (57mm x 0.2mm)
each
895.00
Qty:
91120
Iridium Target, 99.95% Ir (57mm x 0.3mm) (208HR only)
each
2,145.00
Qty:
91124
Iron Target, 99.5% Fe (57mm x 0.12mm)
each
210.00
Qty:
91116
Nickel Target, 99.98% Ni (57mm x 0.1mm)
each
210.00
Qty:
8079
Niobium Target, 99.9% Nb (57mm x 0.2mm) (208HR only)
each
385.00
Qty:
91119
Palladium Target, 99.9% Pd (57mm x 0.1mm)
each
555.00
Qty:
91114
Platinum Target, 99.95% Pt (57mm x 0.1mm)
each
1,024.00
Qty:
8076
Platinum/Palladium Target, 99.99% Pt:Pd 80/20 ratio (57mm x 0.1mm)
each
825.00
Qty:
91115
Platinum/Palladium Target, 99.99% Pt:Pd 80/20 ratio (57mm x 0.2mm)
each
1,485.00
Qty:
91118
Silver Target, 99.99% Ag (57mm x 0.1mm)
each
270.00
Qty:
8075
Tantalum Target, 99.95% Ta (57mm x 0.1mm) (208HR only)
each
435.00
Qty:
91123
Titanium Target, 99.6% Ti (57mm x 0.2mm) (208HR only)
each
395.00
Qty:
8078
Tungsten Target, 99.95% W (57mm x 0.25mm) (208HR only)
each
375.00
Qty:

Spares and Consumables for 108 Series Coaters

Prod #DescriptionUnitPriceOrder / Quote
9607
O-Ring, 120mm, for Glass Cylinder for 108 series coaters
pk/2
$8.50
Qty:
9608
Glass Cylinder (120mm H x 120mm D) for 108 series coaters
each
205.00
Qty:
93010
Pointed Carbon Rods, Double Neck Tip 6.2mm (1/4"), length 1.5", 60Hz
pk/10
69.80
Qty:
93003
Pointed Carbon Rods, Double Neck Tip 6.2mm (1/4"), length 1.5", 50Hz
pk/10
90.20
Qty:
93015
Carbon Rods, Grade 1, 1/4" x 12"(6.5 x 305mm), 60Hz
pk/10
198.00
Qty:
93016
Carbon Rods, Grade 1, 1/4" x 12"(6.5 x 305mm), 50Hz
pk/10
198.00
Qty:
57-10
Two Step Carbon Rod Sharpener, for 1/4" rods (Cressington 108C & 208C)
each
136.30
Qty:
57-12
Replacement Blades for Two Step Carbon Rod Sharpener, for 1/4" rods
pk/2
17.20
Qty:
9612
Carbon Rod Slider Springs for Bradley Carbon Source
pk/5
72.00
Qty:
9613
Carbon Rod Slider, replacement or spare
each
178.00
Qty:
9614
Copper Braids for Bradley Carbon Source
pk/5
78.60
Qty:
9615
Ceramic Insulators for Bradley Carbon Source
pk/8
69.40
Qty:
9616
PTFE Insulator Kit for Bradley Carbon Source
each
48.30
Qty:
9617
Replacement Bradley Carbon Source for 108C and 208C
each
794.00
Qty:
93008
Replacement Crystals for MTM-10/20
pk/3
42.00
Qty:
93009
Replacement Crystals for MTM-10/20
pk/10
93.30
Qty:
9609
Oil Mist Filter for 7010 pump, 1-4
each
54.45
Qty:
891-38
Pfeiffer P3 Oil for #7010 Pump
1 ltr
29.80
Qty:
92061
Exhaust Filter for #92080, VRL 100-3.4
each
81.00
Qty:
891-35
Ultragrade 19 rotary pump oil for #92080
each
17.28
Qty:
 For 108/SE Series Only
8006
Glass Cylinder (150mm D x 150mm H) light deposition, for 208HR, 208C and 108 Auto/SE
each
290.00
Qty:
8009
Glass Cylinder (150mm D x 65mm H) heavy deposition, (standard) for for 208HR, 208C and 108 Auto/SE
each
150.00
Qty:
8025
O-Ring, 150mm, for Glass Cylinder for 208C, 208HR and 108 Auto/SE
pk/2
9.50
Qty:
8091-1
Metal Spacer Ring, for 208HR, 208C and 108 Auto/SE
each
240.00
Qty:

Spares and Consumables for 208 Series Coaters

Prod #DescriptionUnitPriceOrder / Quote
8025
O-Ring, 150mm, for Glass Cylinder for 208C, 208HR and 108 Auto/SE
pk/2
9.50
Qty:
8006
Glass Cylinder (150mm D x 150mm H) light deposition, for 208HR, 208C and 108 Auto/SE
each
290.00
Qty:
8009
Glass Cylinder (150mm D x 65mm H) heavy deposition, (standard) for for 208HR, 208C and 108 Auto/SE
each
150.00
Qty:
8091-1
Metal Spacer Ring, for 208HR, 208C and 108 Auto/SE
each
240.00
Qty:
93010
Pointed Carbon Rods, Double Neck Tip 6.2mm (1/4"), length 1.5", 60Hz
pk/10
69.80
Qty:
93003
Pointed Carbon Rods, Double Neck Tip 6.2mm (1/4"), length 1.5", 50Hz
pk/10
90.20
Qty:
93015
Carbon Rods, Grade 1, 1/4" x 12"(6.5 x 305mm), 60Hz
pk/10
198.00
Qty:
93016<